Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1988-08-10
1989-06-06
Fields, Carolyn E.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
2504401, 250306, 350530, G21K 510, G21K 508
Patent
active
048374458
ABSTRACT:
A coarse adjusting device for coarsely positioning a specimen and a probe relative to each other in a scanning tunneling microscope has a main body having a hollow space formed therein, transmission member extending through the hollow space of the main body and screwed at its one end to the main body so as to be moved in one and the other directions as it is rotated about its axis. The transmission member is provided at its portion within the hollow space with a tapered peripheral surface. The coarse adjusting device also has a coarsely-movable member disposed for movement in the direction perpendicular to the axis of rotation of the transmission member. The coarsely-movable member has one end contacting the tapered surface of the transmission member within the hollow space and the other end extended to the outside of the main body for carrying an object such as a specimen.
REFERENCES:
patent: 4762996 (1988-08-01), Binnig et al.
patent: 4782236 (1988-11-01), Chitayat
Jericho et al., "Scanning Tunneling Microscope with Micrometer Approach and Thermal Compensation", Rev. Sci. Instrum., 58 (8), 8/87, pp. 1349-1352.
Scott et al., "Magnetically Driven Micropositioners" Rev. Sci. Instrum., vol. 56 pp. 1970-1971 (1985).
Rinnig et al., "Scanning Tunneling Microscopy", Surface Science vol. 126 pp. 236-244 (1983).
Corb et al., "An Electromagnetic Microscopic Positioning Device for the Scanning Tunneling Microscope" Journal Appl. Phys. vol. 58 pp. 3947-3953 (1985).
Demuth et al., "A Simplified Scanning Tunneling Microscope for Surface Science Studies" J. Vac. Sci. Technol. vol. A 4(3), pp. 1320-1323 (1986).
Koyama Hiroshi
Nishioka Tadashi
Yasue Takao
Fields Carolyn E.
Miller John A.
Mitsubishi Denki & Kabushiki Kaisha
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