Charged-particle beam instrument and method of detection

Details Charged-particle beam instrument and method of detection Charged-particle beam instrument and method of detection

2008-04-01

2008-04-01

Vanore, David A. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S309000, C250S311000, C250S3960ML, C250S3960ML, C250S397000, C250S492200, C250S492300

Reexamination Certificate

active

07351971

ABSTRACT:
A charged-particle beam instrument and method are offered which can inspect side and rear surfaces of the outer periphery of a specimen. The instrument has a source of the charged-particle beam and an objective lens for focusing the beam onto the specimen positioned inside a specimen chamber. The instrument further includes an electrostatic electrode and a deflection voltage power supply for applying a deflection voltage to the electrostatic electrode located on a downstream side of the objective lens. The electrostatic electrode reflects or deflects the beam passed through the objective lens such that the beam is directed at the specimen.

REFERENCES:
patent: 3753034 (1973-08-01), Spicer
patent: 5254417 (1993-10-01), Wada
patent: 6104034 (2000-08-01), Frosien et al.
patent: 6534766 (2003-03-01), Abe et al.
patent: 6797953 (2004-09-01), Gerlach et al.
patent: 6825475 (2004-11-01), Petrov et al.
patent: 6952105 (2005-10-01), Cheng et al.
patent: 7067807 (2006-06-01), Petrov et al.
patent: 7067808 (2006-06-01), Kochi et al.
patent: 7218126 (2007-05-01), Cheng et al.
patent: 7244932 (2007-07-01), Nakasuji et al.
patent: 2001/0010357 (2001-08-01), Ose et al.
patent: 2004/0056207 (2004-03-01), Petrov et al.
patent: 2006/0049348 (2006-03-01), Petrov et al.
patent: 2007/0018100 (2007-01-01), Tanaka et al.
patent: 08-185823 (1996-07-01), None

Affiliated with

Also associated with

Rating

Charged-particle beam instrument and method of detection does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged-particle beam instrument and method of detection, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged-particle beam instrument and method of detection will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2766693