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Microstructured pattern inspection method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Microstructured pattern inspection method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Microstructured pattern inspection method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Microstructured pattern inspection method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Microstructured pattern inspection method

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Microsystem manipulation apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Microtip, process for preparation thereof, surface-observing app

Radiant energy – Inspection of solids or liquids by charged particles
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Miniaturized secondary electron detector

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Modular manipulation system for manipulating a sample under...

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
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Modular manipulation system for manipulating a sample under...

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
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Molecular imaging system

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent

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Monitoring of contact hole production

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Monochromator and scanning electron microscope using the same

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Monochromator and scanning electron microscope using the same

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Monocrystalline test and reference structures, and use for calib

Radiant energy – Inspection of solids or liquids by charged particles
Patent

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Monocrystalline test structures, and use for calibrating instrum

Radiant energy – Inspection of solids or liquids by charged particles
Patent

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Motion picture output from electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Motorized manipulator for positioning a TEM specimen

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
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Motorized X-ray tube assembly

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent

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Movable carriage for a lithographic apparatus and device...

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
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