Microsystem manipulation apparatus

Details Microsystem manipulation apparatus Microsystem manipulation apparatus

2006-06-16

2009-12-22

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S442110, C250S306000, C250S311000

Reexamination Certificate

active

07635844

ABSTRACT:
A microsystem manipulation apparatus and an associated kit is described that may be used to facilitate the assembly and testing of Microsystems and microsystem components. The microsystem manipulation apparatus may include a scanning electron microscope imaging system, a stage, and at least one manipulator having an associated tool. The microsystem manipulation apparatus may be partially or fully automated to provide for routine microsystem assembly, disasembly, and/or testing. The associated kit may include one or more manipulators and associated tools for retrofitting an existing scanning electron microscope to produce a microsystem manipulation apparatus.

REFERENCES:
patent: 7196454 (2007-03-01), Baur et al.
patent: 2003/0089852 (2003-05-01), Ochiai et al.
patent: 2005/0199828 (2005-09-01), Tokuda et al.
patent: 2006/0163478 (2006-07-01), Jaksch et al.

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