Miniaturized secondary electron detector

Details Miniaturized secondary electron detector Miniaturized secondary electron detector

1998-11-23

2000-10-10

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 37244

Patent

active

061304298

ABSTRACT:
To miniaturize a secondary-electron detector, a ring-shaped secondary-electron emissive material layer 44A is formed on a ring-shaped base 41 having a round hole 41a, via a ring-shaped insulating layer 42A and a ring-shaped high resistance layer 43A. Similarly, a ring-shaped secondary-electron emissive material layer 44B is formed on a ring-shaped base 33 having a round hole 33a, via a ring-shaped insulating layer 42B and a ring-shaped high resistance layer 43B. A arc-shaped multiplied-electron collecting electrode 461 is joined between the insulating layers 42A and 42B outside the secondary-electron emissive material layer 44B. A porous secondary-electron multiplication substance may be filled between opposed bases instead of the secondary-electron emissive material layers 44A and 44B, and an optical fiber coated with phosphor may be used instead of the electrode 461.

REFERENCES:
patent: 4958079 (1990-09-01), Gray
T. Chang, et al., "Electron-Beam Microcolumns for Lithography and Relatted Applications"; JVST, B 14(6), Nov./Dec. 1996.
Micro Sphere Plate, El-Mul Technologies Ltd. undated.

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