Radiant energy – Inspection of solids or liquids by charged particles
Patent
1997-05-21
1999-07-06
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
257 48, G01R 3126
Patent
active
059200677
ABSTRACT:
An improved test structure for measurement of width of conductive lines formed on substrates as performed in semiconductor fabrication, and an improved reference grid for calibrating instruments for such measurements, is formed from a monocrystalline starting material, having an insulative layer formed beneath its surface by ion implantation or the equivalent, leaving a monocrystalline layer on the surface. The monocrystalline surface layer is then processed by preferential etching to accurately define components of the test structure. The substrate can be removed from the rear side of the insulative layer to form a transparent window, such that the test structure can be inspected by transmissive-optical techniques. Measurements made using electrical and optical techniques can be correlated with other measurements, including measurements made using scanning probe microscopy. Nested quadrilateral calibration reference grids particularly useful in calibrating optical coordinate measurement instruments are disclosed.
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Allen Richard A.
Cresswell Michael W.
Gaitan Michael
Ghoshtagore R. N.
Linholm Loren W.
Berman Jack I.
De Angeli P.C. Michael M.
The United States of America as represented by the Secretary of
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