Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent
1992-05-21
1993-12-21
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
250423P, H01J 37252
Patent
active
052723380
ABSTRACT:
An ion-beam based system enables quantitative analysis and visualization of a sample with atomic and molecular specificity. The system comprises a liquid metal ion source that directs a tightly focused beam of ions at the sample, the beam having an ion density that is insufficient to materially change the surface properties of the sample. A controller connected to the liquid metal ion source gates on the ion beam for a period of time that is sufficient to enable the ion source to achieve a tight focus of the beam at the sample and for further scanning the ion beam across the sample. A laser beam is positioned over the sample and has a wavelength that resonantly ionizes components of the sample that are liberated by action of the scanned ion beam. A detector measures the liberated ionized components and is connected to a display system that provides an image of the distribution of the species on surface of the sample.
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Benkovic Stephen J.
Winograd Nicholas
Anderson Bruce C.
Monahan Thomas J.
The Pennsylvania Research Corporation
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