Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2007-06-12
2007-06-12
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C250S492200
Reexamination Certificate
active
11231791
ABSTRACT:
A movable carriage for moving an article support member in a lithographic apparatus is provided. The article support member is constructed and arranged to move and support an article to be placed in a beam path of the lithographic apparatus. The carriage includes a compartmented composite structure.
REFERENCES:
patent: 7012264 (2006-03-01), Terken et al.
Jacobs Hernes
Maria Zaal Koen Jacobus Johannes
Terken Martinus Arnoldus Henricus
Van Der Schoot Harmen Klaas
Vosters Petrus Matthijs Henricus
ASML Netherlands B.V.
Nguyen Kiet T.
Pillsbury Winthrop Shaw & Pittman LLP
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