Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2008-10-17
2010-12-14
Berman, Jack I (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C250S443100, C250S441110, C250S306000, C250S307000, C250S309000, C250S310000, C250S311000, C310S323210, C310S323170, C310S328000, C310S333000, C310S012140, C310S0400MM
Reexamination Certificate
active
07851769
ABSTRACT:
The invention relates to a motorized manipulator for positioning a TEM specimen holder with sub-micron resolution parallel to a y-z plane and rotating the specimen holder in the y-z plane, the manipulator comprising a base (2), and attachment means (30) for attaching the specimen holder to the manipulator, characterized in that the manipulator further comprises at least three nano-actuators (3a, 3b, 3c) mounted on the base, each nano-actuator showing a tip (4a, 4b, 4c), the at least three tips defining the y-z plane, each tip capable of moving with respect to the base in the y-z plane; a platform (5) in contact with the tips of the nano-actuators; and clamping means (6) for pressing the platform against the tips of the nano-actuators; as a result of which the nano-actuators can rotate the platform with respect to the base in the y-z plane and translate the platform parallel to the y-z plane.
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Physik Instrumente GMBH & Co. KG, “High Performance Piezo Actuators for OEM, Industry and Research,” Catalogue, Sep. 2005, pp. 1-25, Catalogue No. 118 05/09.17.
Andresen Nord
Schmid Andreas Karl
Berman Jack I
Griner David
Sahu Meenakshi S
Scheinberg Michael O.
Scheinberg & Griner LLP
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