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Inspection system by charged particle beam and method of...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Inspection system by charged particle beam and method of...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Inspection system utilizing retarding field back scattered elect

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Inspection system, inspection method, and process management...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Inspection system, inspection method, and process management...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Installation and method for microscopic observation of a...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Installation for the study or the transformation of the surface

Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
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Instrument and method for 3-dimensional atomic arrangement obser

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Instrument and method for 3-dimensional atomic arrangement obser

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Instrument and method for observing selected stored images...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Instrument for analyzing specimen

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Instrument for very high resolution ionic micro-analysis of a so

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Patent

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Integrated charge neutralization and imaging system

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
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Integrated circuit structure analysis

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Integrated critical dimension control for semiconductor...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Integrated electron beam and contaminant removal system

Radiant energy – Inspection of solids or liquids by charged particles
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Integrated electron beam tip and sample heating device for a...

Radiant energy – Inspection of solids or liquids by charged particles
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Integrated electron optical/differential pumping/imaging signal

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Integrated electron optical/differential pumping/imaging signal

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Integrated local and global optical metrology for samples...

Radiant energy – Inspection of solids or liquids by charged particles
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