Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-07-11
2006-07-11
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S397000
Reexamination Certificate
active
07075076
ABSTRACT:
The present invention relates to an inspection apparatus comprising:an electron emitting unit for sequentially emitting an electron beam in the direction of the inspection area of a sample;a decelerating means for drawing back the electron beam in the vicinity of the inspection area;an imaging unit for forming images of the electron beam, which has been drawn back in the vicinity of the inspection area, on multiple different image forming conditions;an image detecting unit for capturing the electron beam that formed an image corresponding to each image forming condition and an image processing unit for comparing the images on different image forming conditions with one another to thereby detect a defect in the inspection area.
REFERENCES:
patent: 6563114 (2003-05-01), Nagahama et al.
patent: 6614022 (2003-09-01), Hiroi et al.
patent: 6797954 (2004-09-01), Shinada et al.
patent: 2003/0127593 (2003-07-01), Shinada et al.
patent: 11-037957 (1999-02-01), None
patent: 11-108864 (1999-04-01), None
patent: 2003-202217 (2000-07-01), None
patent: 2000-286310 (2000-10-01), None
“Imaging Hot-Electron Emission from Metal-Oxide-Semiconductor Structures”, Marian Makos et al., Physical Review Letters, vol. 76, No. 17, Apr. 22, 1996; pp. 3200-3203.
“Low-energy Electron Microscopy”; R.M. Tromp, IBM J. Res. Develop., vol. 44, No. 4, Jul. 4, 2000, pp. 503-516.
Makino Hiroshi
Murakoshi Hisaya
Shinada Hiroyuki
Todokoro Hideo
Hitachi High-Technologies Corp.
Mattingly ,Stanger ,Malur & Brundidge, P.C.
Nguyen Kiet T.
LandOfFree
Inspection system, inspection method, and process management... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Inspection system, inspection method, and process management..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Inspection system, inspection method, and process management... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3575105