Integrated electron beam and contaminant removal system

Details Integrated electron beam and contaminant removal system Integrated electron beam and contaminant removal system

2006-07-18

2006-07-18

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S310000, C250S311000, C250S431000, C250S443100, C438S014000

Reexamination Certificate

active

07078689

ABSTRACT:
One embodiment disclosed relates to an integrated electron beam inspection and contaminant removal tool. An electron beam column is configured to image an area on a substrate being inspected. A contaminant removal subsystem is integrated with the electron beam column and configured to remove contamination from a surface of the substrate. Means is advantageously included by which the substrate is kept from being exposed to air between the contaminant removal subsystem and the electron beam column.

REFERENCES:
patent: 5554854 (1996-09-01), Blake
patent: 5633506 (1997-05-01), Blake
patent: 6221169 (2001-04-01), Bernstein et al.
patent: 6427703 (2002-08-01), Somekh
patent: 6753194 (2004-06-01), Ushiki et al.
patent: 2002/0053353 (2002-05-01), Kawata et al.
patent: WO 00/19518 (2000-04-01), None
patent: WO 01/59831 (2001-08-01), None

Affiliated with

Also associated with

Rating

Integrated electron beam and contaminant removal system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated electron beam and contaminant removal system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated electron beam and contaminant removal system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3605920