Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2006-06-12
2008-08-12
Nguyen, Kiet T (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S397000
Reexamination Certificate
active
07411190
ABSTRACT:
An inspection apparatus comprising an electron emitting unit for sequentially emitting an electron beam in the direction of an inspection area of a sample; a deceleration unit for drawing back the electron beam in the vicinity of the inspection area; an imaging unit for forming images of the drawing back electron beam on multiple different image forming conditions; an image detecting unit for capturing the electron beam that formed an image corresponding to each image forming condition; and an image processing unit for comparing the images on different image forming conditions with one another to detect a defect in the inspection area.
REFERENCES:
patent: 6563114 (2003-05-01), Nagahama et al.
patent: 6614022 (2003-09-01), Hiroi et al.
patent: 6797954 (2004-09-01), Shinada et al.
patent: 7075076 (2006-07-01), Makino et al.
patent: 2003/0127593 (2003-07-01), Shinada et al.
patent: 11-37957 (1989-05-01), None
patent: 11-108864 (1999-04-01), None
patent: 2000-286310 (2000-10-01), None
patent: 2003-202217 (2003-07-01), None
“Imaging Hot-Electron Emission from Metal-Oxide-Semiconductor Structures”; Marian Mankos et al., Physical Review Letters, vol. 76, No. 17, Apr. 22, 1996; pp. 3200-3203.
“Low-energy Electron Microscopy”,; R.M. Tromp, IBM J. Res. Develop., vol. 44, No. 4, Jul. 4, 2000, pp. 503-516.
Makino Hiroshi
Murakoshi Hisaya
Shinada Hiroyuki
Todokoro Hideo
Hitachi High-Technologies Corporation
Mattingly ,Stanger ,Malur & Brundidge, P.C.
Nguyen Kiet T
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