Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2005-05-03
2005-05-03
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S311000, C250S306000, C250S307000, C250S397000
Reexamination Certificate
active
06888137
ABSTRACT:
There is disclosed a scanning electron charged-particle beam instrument facilitating a search for a desired field of view on a specimen. Also, a method of observing a specimen image with this instrument is disclosed. In field of view search mode, low-magnification images are gained from plural regions on the specimen. The image signals gained from the regions are sent to corresponding image memories and stored there. At the same time, the X and Y coordinates of the specimen at the low magnification are stored. If the image is rotated, the angular position and the direction are simultaneously stored. The image signals stored in the image memories are supplied to a CRT, and plural specimen images are displayed on the CRT. If a human operator selects a desired one out of the displayed images, a control unit controls a stage control unit according to coordinates read out, driving an X-Y translation stage. The stage is moved to bring a specimen position corresponding to the selected image onto the optical axis of the electron beam.
REFERENCES:
patent: 5834774 (1998-11-01), Negishi et al.
patent: 6225628 (2001-05-01), Iwabuchi et al.
patent: 6768114 (2004-07-01), Takagi
patent: 7130321 (1995-05-01), None
Kobayashi Toshiharu
Negishi Tsutomu
Watanabe Norio
Yamada Atsushi
JEOL Ltd.
Lee John R.
Vanore David A.
Webb Ziesenheim & Logsdon Orkin & Hanson, P.C.
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