Integrated electron beam tip and sample heating device for a...

Radiant energy – Inspection of solids or liquids by charged particles

Reexamination Certificate

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C250S440110, C250S443100, C250S307000

Reexamination Certificate

active

07427755

ABSTRACT:
An electron beam heating device with the temperature up to 2200 K is provided for heating a sample and a tip for a scanning tunneling microscope (STM). The electron beam heating device includes a base stage for mating respectively with an electron beam sample heating carrier and an electron beam tip heating carrier, both carriers include a filament. The integration of the filament into the transferable electron beam sample heating carrier and electron beam tip heating carrier enables filament exchange without venting the vacuum system. A fixed distance between the sample and the filament enables reproducible sample temperature control and the filament is mounted at a back of the sample, allowing optical access for temperature measurement, and allowing sample preparation processes without changing positions of the sample or the filament. Once the tip is loaded, a fixed relative position between the tip and the filament enables reproducible control of heating. A tip holder includes an electrically isolated post connected to the tip, enabling a separate electrical potential to be applied to the tip.

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