Integrated circuit structure analysis

Details Integrated circuit structure analysis Integrated circuit structure analysis

1991-07-05

1993-03-02

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, 250397, H01J 3728, H01J 3730

Patent

active

051912139

ABSTRACT:
The structure of a multilayered integrated circuit is determined by removing successive layers of the circuit. Following removal of each layer, the revealed surface is scanned by an electron beam. The intensity of backscattered or secondary electrons is detected by a first or second detector respectively. From the detected electron intensities, image processing circuitry derives a representation of the integrated circuit surface scanned. Where the surface of the integrated circuit is a flat layer of semiconductor substrate material having implanted doped areas, the surface is covered with a metallisation layer providing a Schottky barrier junction with the doped areas. Electron beam scanning of the metallisation layer induces a current at this junction which is monitored and processed to derive a representation of the outline of the doped implanted areas.

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patent: 4871911 (1989-10-01), Van Gorkom et al.
patent: 4933565 (1990-06-01), Yamaguchi et al.

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