Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2006-06-01
2008-07-08
Nguyen, Kiet T (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S307000
Reexamination Certificate
active
07397030
ABSTRACT:
This invention relates to an apparatus and method for integrated measurement of a sample that has miniature features. The apparatus has an optical measuring unit for illuminating the sample with a global test radiation over an optical test region and obtaining an optical response, such as scattered or transmitted radiation from the optical test region. In addition, the apparatus has a local measuring unit for making a nanometer scale measurement of a local material parameter ρ of the sample. The local parameter ρ is determined with a mechanical, optical, magnetic, electric or other physical measurement performed in the nanometer range with a scanning probe tip at a test location lying within the optical test region. The material parameter ρ is selected such that it is substantially constant or uniform over the illuminated area. A computational unit determines a property of the miniature features within the optical test region from the optical response supplemented with an adjustment derived from the local material parameter obtained by the local measuring unit.
REFERENCES:
patent: 5017007 (1991-05-01), Milne et al.
patent: 5955654 (1999-09-01), Stover et al.
patent: 5994691 (1999-11-01), Konada
patent: 6000281 (1999-12-01), Burke
patent: 6052238 (2000-04-01), Ebbesen et al.
patent: 6194711 (2001-02-01), Tomita
patent: 6441359 (2002-08-01), Cozier et al.
patent: 6489611 (2002-12-01), Aumond et al.
patent: 6602723 (2003-08-01), Markle et al.
patent: 6617569 (2003-09-01), Narita et al.
patent: 6621079 (2003-09-01), Shao et al.
patent: 6630362 (2003-10-01), Lensing
patent: 6643012 (2003-11-01), Shen et al.
patent: 6650423 (2003-11-01), Markle et al.
patent: 6658922 (2003-12-01), Leigh et al.
patent: 6668628 (2003-12-01), Hantschel et al.
patent: 6710331 (2004-03-01), Narita et al.
patent: 6728591 (2004-04-01), Hussey, Jr. et al.
patent: 6850323 (2005-02-01), Anderson
patent: 6917901 (2005-07-01), Bowley, Jr. et al.
patent: 6980937 (2005-12-01), Hayes
patent: 6986280 (2006-01-01), Muckenhirm
patent: 7032427 (2006-04-01), Niwa et al.
patent: 2003/0039429 (2003-02-01), Inoue et al.
patent: 2004/0080757 (2004-04-01), Stanke et al.
patent: 2005/0128489 (2005-06-01), Bao et al.
patent: 2006/0064280 (2006-03-01), Vuong et al.
Balooch Mehdi
Forouhi Abdul Rahim
n&k Technology Inc.
Nguyen Kiet T
LandOfFree
Integrated local and global optical metrology for samples... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Integrated local and global optical metrology for samples..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated local and global optical metrology for samples... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3963514