Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1988-10-06
1990-06-12
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250307, H01J 3726
Patent
active
049335529
ABSTRACT:
A system for inspection of substrates and circuit devices employing a retarding field in an E-beam to reduce the incident beam energy to the crossover point at which minimum substrate charging occurs. This selectively separates backscattered electrons from secondary electrons emitted from the sample surface. An E-beam is columnated and directed through a bias plate and annular detector on a sample held at a negative bias with respect to the detector and the plate. The negative bias is selected so that the incident beam strikes the substrate at the crossover energy to permit collection of backscattered electrons. This selective detection generates a sharp image of the sample surface.
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patent: 3736422 (1973-05-01), Weber et al.
patent: 3896308 (1975-07-01), Venables et al.
patent: 4564758 (1986-01-01), Slodzian et al.
Brunner et al., Microelectronic Engineering, 7, (1987), pp. 41, 47.
Berman Jack I.
International Business Machines - Corporation
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