Instrument for very high resolution ionic micro-analysis of a so

Details Instrument for very high resolution ionic micro-analysis of a so Instrument for very high resolution ionic micro-analysis of a so

1985-12-24

1987-09-15

Fields, Carolyn E.

Radiant energy

Inspection of solids or liquids by charged particles

Positive ion probe or microscope type

250310, 250398, 250399, H01J 37256

Patent

active

046941703

ABSTRACT:
A sample (EC) is mounted on a sample carrier (PO). Vertically thereabove a common optical portion (5) receives a beam of primary ions derived from an ion source (S10) together with a beam of primary electrons derived from an electron source (S30). The secondary electrons and ions due to the sample (EC) being bombarded by said primary ions and electrons are retrieved by said common optical portion (5). The electrons are detected by electron detection means (D40). The secondary optical system (2) transmits the secondary ions to a mass spectrometer (SP20). This instrument is capable of providing ion and electron images of a single sample simultaneously.

REFERENCES:
patent: 3517191 (1970-06-01), Liebl
patent: 3585383 (1971-06-01), Caistaing et al.
patent: 3617739 (1971-11-01), Liebl
patent: 3845305 (1974-10-01), Liebl
patent: 4564758 (1986-01-01), Slodzian et al.
Nuclear Instruments & Methods in Physics Research, vol. 187, No. 1, Aug. 1981, pp. 143-151, North-Holland Publishing Company, Amsterdam, NL; H. Liebl: "Beam Optics in Secondary Ion Mass Spectrometry".

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