Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1988-04-13
1989-08-15
Howell, Janice A.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250305, H01J 3700
Patent
active
048577316
ABSTRACT:
An x-ray microanalyzer is a useful instrument which obtains an image representing the distribution of the constituent elements of a specimen, by detecting characteristic x-rays produced from a microscopic region on the specimen. The present invention is intended to enhance the efficiency of such an analysis of a specimen using an x-ray microanalyzer. A region of interest is designated upon the aforementioned image. The average weight concentration of the constituent elements in this region or information about the distribution of signal intensities is quickly obtained.
REFERENCES:
patent: 4253154 (1981-02-01), Russ et al.
patent: 4439680 (1984-03-01), Broadhurst
patent: 4553030 (1985-11-01), Tokiwai et al.
"Microbeam Analysis 1985", John T. Armstrong, Ed., Proceedings of the 20th Annual Conference of the Microbeam Analysis Society, Louisville, Ky., 5-9 Aug. 1985, pp. 82-84, 145-147.
"Microbeam Analysis 1986", A. D. Romig, Jr. and W. F. Chambers, Eds., Proceedings of the 21st Annual Conference of the Microbeam Analysis Society, Albuquerque, New Mexico, 11-15 Aug. 1986, pp. 271-278.
Aranoff Michael
Howell Janice A.
Jeol Ltd.
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