Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1992-07-01
1993-10-05
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
2504411, 250396ML, H01J 37252
Patent
active
052508080
ABSTRACT:
This invention provides for an integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope (ESEM). The ESEM includes a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube. An annular ring comprised of magnetic materials abuts said magnetic housing at the lower end thereof and contains at least two pumping ports therein located axially with respect to one another. At least two annular nonmagnetic diaphragms and a final magnetic annular diaphragm are attached to the annular ring at different axial locations and extending inwardly therefrom. The diaphragms define at least two interior passages which each communicate with one of the pumping ports formed in the annular ring. A combination aperture holder and electron detector is releasably received and sealed with in the central openings of the annular diaphragms. The aperture holder has apertures therein for the passage of the electron beam and gas into and out of the specimen chamber of the ESEM and the interior passages and has electron detector means associated with the lower portion thereof.
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Danilatos, G. D., "Improvements on the Gaseous Detector Device" G. D. Bailey, Ed. Proceedings of the 44th Annual Meeting of the Electron Microscopy of America, pp. 630-631 (1986).
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Danilatos, G. D. et al., "Principles of Scanning Electron Microscopy at High Specimen Chamber Pressures," Scanning, vol. No. 2, 1979, pp. 72-82.
Danilatos Gerasimos D.
Lewis George C.
Berman Jack I.
Electro-Scan Corporation
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