Apparatus and method for tilted particle-beam illumination

Apparatus and method for wafer pattern inspection

Apparatus and method for wafer pattern inspection

Apparatus and method including a direct bombardment detector...

Apparatus and method of aligning electron beam of scanning elect

Apparatus and methods for inspecting wafers and masks using mult

Apparatus and methods for secondary electron emission...

Apparatus for automatically controlling the magnification factor

Apparatus for detecting backscattered electrons in a beam...

Apparatus for detecting focused condition of charged particle be

Apparatus for detecting or collecting secondary electrons, charg

Apparatus for displaying a sample image

Apparatus for displaying image of specimen

Apparatus for improving the signal-to-noise ratio of image signa

Apparatus for inspecting a specimen

Apparatus for inspection of semiconductor wafers and masks...

Apparatus for inspection with electron beam, method for...

Apparatus for irradiating flowing materials

Apparatus for measuring a three-dimensional shape

Apparatus for measuring specimen potential in electron microscop