Apparatus for detecting backscattered electrons in a beam...

Details Apparatus for detecting backscattered electrons in a beam... Apparatus for detecting backscattered electrons in a beam...

2007-12-20

2010-12-14

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S3960ML, C250S492300

Reexamination Certificate

active

07851755

ABSTRACT:
A beam apparatus has a beam source producing a primary electron beam, an objective lens focusing the beam onto an observed sample, and at least one condenser lens mounted between the beam source and the objective lens. The condenser lens operates such that the beam forms one crossover point between the condenser lens and the objective lens. A first detector is mounted at the crossover point or at a position closer to the sample than the crossover point. A second detector is mounted at a position closer to the electron source than the crossover point.

REFERENCES:
patent: 4424448 (1984-01-01), Takigawa et al.
patent: 2003/0089859 (2003-05-01), Adamec
patent: 2003/0155509 (2003-08-01), Nakasuji et al.
patent: 2005/0104006 (2005-05-01), Yoshida et al.
patent: 2006/0145087 (2006-07-01), Parker
patent: 2006/0243908 (2006-11-01), Shinada et al.
patent: 2007/0040118 (2007-02-01), Cheng et al.
patent: 2007/0120071 (2007-05-01), Steigerwald et al.
patent: 2008/0035853 (2008-02-01), Doering et al.
patent: 2008/0121810 (2008-05-01), Liu et al.
patent: 2008/0308729 (2008-12-01), Kimba et al.
patent: 09-219170 (1997-08-01), None
patent: 2000-030654 (2000-01-01), None
patent: 3136353 (2000-08-01), None
patent: 2000-299078 (2000-10-01), None
patent: 2004-221089 (2004-08-01), None

Affiliated with

Also associated with

Rating

Apparatus for detecting backscattered electrons in a beam... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for detecting backscattered electrons in a beam..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for detecting backscattered electrons in a beam... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4201141