Apparatus and method of aligning electron beam of scanning elect

Details Apparatus and method of aligning electron beam of scanning elect Apparatus and method of aligning electron beam of scanning elect

1993-07-16

1994-10-25

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, G01N 23225

Patent

active

053591976

ABSTRACT:
In a gun (or lens) alignment control apparatus for an scanning electron microscope, a condenser (or objective) lens is controllably set to first and second conditions, respectively; first and second filament (or secondary electron) images obtained under the first and second conditions are inputted, respectively; the first and second filament (or secondary electron) images are processed to obtain first and second binarized images, respectively; the first and second binarized images are further processed to obtain first and second histograms, respectively; first and second coordinates at which the first and second histograms become maximum in frequency are detected, respectively; and exciting current for a gun (or lens) alignment coil is controlled so that the two coordinates match each other. Since the excitation of the gun (or lens) alignment coil can be controlled automatically so that the filament (or secondary electron) image obtained by the scanning electron microscope will not be shifted, the alignment error can be reduced and thereby an excellent image can be obtained.

REFERENCES:
patent: 4618766 (1986-10-01), van der Mast et al.
patent: 4663525 (1987-05-01), Ohtsuki et al.
patent: 5144129 (1992-09-01), Kobayashi et al.

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