Apparatus and method including a direct bombardment detector...

Details Apparatus and method including a direct bombardment detector... Apparatus and method including a direct bombardment detector...

2011-05-31

2011-05-31

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S311000

Reexamination Certificate

active

07952073

ABSTRACT:
An apparatus for use with an electron beam for imaging a sample. The apparatus has a down-conversion detector configured to detect an electron microscopy signal generated by the electron beam incident on the sample, a direct bombardment detector adjacent to the down-conversion detector and configured to detect the electron microscopy signal, and a mechanism selectively exposing the down-conversion detector and the direct bombardment detector to the electron microscopy signal. A method using the apparatus is also provided.

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International Search Report for PCT/US2009/052309 for Direct Electron, LP. 7 pages.

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