Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1993-11-24
1995-02-28
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250306, 250311, H01J 37256
Patent
active
053939760
ABSTRACT:
An apparatus for displaying a sample image comprises a scanning illumination system 3 for scanning a sample by an irradiation ray ray being relatively moved, a first detection portion 7 for detecting a first detection signal obtained from a continuous area of the sample by the irradiation ray ray, a second detection portion 9 for detecting a faint second detection signal obtained from a micro-discrete area of the sample by the irradiation ray ray, a signal processing portion 16 for processing the second detection signal such that a pixel size in accordance with the second detection signal is enlarged relative to a pixel size in accordance with the first detection signal, an image signal formation portion 17 for forming a superimposed image signal by superimposing the second detection signal processed by the signal processing portion upon the first detection signal, and an image display portion 19 for displaying an image of the sample in accordance with the superimposed image signal.
REFERENCES:
patent: 3614311 (1971-10-01), Fujiyasu et al.
patent: 4041311 (1977-08-01), Martin
patent: 4146788 (1979-03-01), Mirkin et al.
patent: 4560872 (1985-12-01), Antonovsky
Berman Jack I.
Kabushiki Kaisha Topcon
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