Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1988-09-07
1990-03-27
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250306, 250311, 356376, H01J 3728
Patent
active
049123289
ABSTRACT:
An apparatus for improving the signal-to-noise ratio of a scan-type imaging system, in which an image portion which appears virtually periodically or regularly on contiguous scanning lines and a scanning line for which the improvement of signal-to-noise ratio is intended are specified using cursors, the positional differences on the image signal waveforms between the specified scanning line and scanning lines in the specified image portion are detected, and the image signal waveforms in the specified image portion are added by being shifted by the amount of detected positional differences, so that the signal-to-noise ratio of the image signal waveform of the specified scanning line is improved.
REFERENCES:
patent: 4039829 (1977-08-01), Kato et al.
patent: 4567364 (1986-01-01), Kano et al.
Arima Juntaro
Furuya Toshihiro
Kato Makoto
Yokoyama Tetsuo
Berman Jack I.
Hitachi , Ltd.
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