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Automated feature analysis with off-axis tilting

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate

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Automatic preliminary irradiation apparatus in transmission elec

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent

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Automatic structure analyzing/processing apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent

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Automatically adjustable electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent

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Beam deflection and focusing system for a scanning corpuscular-b

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent

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Bi-directional electron beam scanning apparatus

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Bio electron microscope and observation method of specimen

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Characterizing resist line shrinkage due to CD-SEM inspection

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Charged particle beam apparatus and dimension measuring method

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Charged particle beam apparatus and dimension measuring method

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Charged particle beam apparatus and specimen holder

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Charged particle beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent

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Charged particle beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Charged particle beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Charged particle beam device

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate

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Charged particle beam device with DF-STEM image valuation...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate

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Charged particle guide apparatus and image viewing apparatus for

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent

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Cold trap for electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent

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Combined electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Computer control of the electron microscope sample stage

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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