Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1988-08-30
1990-07-03
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250396R, H01J 37147
Patent
active
049393650
ABSTRACT:
A transmission electron microscope for irradiating a specimen with an electron beam, wherein the electron beam passed through the specimen is imaged on an imaging screen by a magnifying lens system. The electron microscope includes a deflector for deflecting the electron beam to thereby scan a specimen with the electron beam, and a memory for storing a range within which the specimen is to be preliminarily scanned with the electron beams and the number of scans to be performed. The specimen is preliminarily scanned with the electron beam within the preliminary scan range for the number of times on the basis of the corresponding data read out from the memory.
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"Electron Microscope Observation Method" edited by Japan Society of Electron Microscopy, p. 90, no translation.
Kamimura Shoji
Kobayashi Hiroyuki
Mori Akio
Okamura Sadahiko
Suzuki Teruo
Anderson Bruce C.
Hitachi , Ltd.
Hitachi Instrument Engineering Co., Ltd.
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