Computer control of the electron microscope sample stage

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type

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250307, H01J 3726

Patent

active

051792800

ABSTRACT:
A method and apparatus for controlling the tilting of the sample stage of an electron microscope along X and Y axes are disclosed. A plurality of different orientations are displayed stereoscopically on a monitor with a spot representing the current orientation being highlighted. The control signals which cause the sample to tilt are generated by moving a cursor on the stereoscopic projection.

REFERENCES:
patent: 3727051 (1973-04-01), Page

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