Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Patent
1990-10-12
1993-01-12
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
250307, H01J 3726
Patent
active
051792800
ABSTRACT:
A method and apparatus for controlling the tilting of the sample stage of an electron microscope along X and Y axes are disclosed. A plurality of different orientations are displayed stereoscopically on a monitor with a spot representing the current orientation being highlighted. The control signals which cause the sample to tilt are generated by moving a cursor on the stereoscopic projection.
REFERENCES:
patent: 3727051 (1973-04-01), Page
Berman Jack I.
Chi & Associated Inc.
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