Cold trap for electron microscope

Details Cold trap for electron microscope Cold trap for electron microscope

1978-06-20

1979-12-18

Dixon, H.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250457, G01M 2300

Patent

active

041796055

ABSTRACT:
A specimen anticontamination device for an electron microscope incorporates a cold trap installed outside the magnetic pole pieces of the objective lens. This cold trap effectively absorbs the residual gases which contribute to the specimen contamination, because its position is nearer the residual gas source than the conventional cold trap installed near the specimen and inside the magnetic pole pieces. For this reason, the device is very effective as an anticontamination means particularly in electron microscopes having a narrow objective lens pole piece gap wherein the space available would preclude installation of the conventional anticontamination device.

REFERENCES:
patent: 3008044 (1961-11-01), Buchihold
patent: 3387132 (1968-06-01), Hermann et al.
patent: 3916201 (1975-10-01), Herman et al.

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