Charged particle guide apparatus and image viewing apparatus for

Details Charged particle guide apparatus and image viewing apparatus for Charged particle guide apparatus and image viewing apparatus for

1996-08-23

1998-09-22

Anderson, Bruce

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250397, H01J 37244

Patent

active

058118055

ABSTRACT:
An electron-microscope image viewing apparatus capable of measuring of a moving speed or a vibration frequency of an atomic structure, a magnetic structure, an electric structure or the like of a specimen even when the structure changes at a high rate. The apparatus includes a charged particle source for emitting charged particles, an illuminating electron lens system for illuminating a specimen with a beam of the charged particles, an image magnifying/projecting lens system for magnifying an image of the specimen formed by charged particles scattered upon transmission through the specimen and projecting the magnified image onto an image forming plane, at least one charged particle extracting means provided on the image forming plane of the image magnifying/projecting lens system for taking out the charged particles from a predetermined portion of the charged particle beam projected onto the image forming plane, at least one charged particle detector for detecting the charged particles taken out through the charged particle extracting means, and a signal processing means for processing a signal outputted from the charged particle detector.

REFERENCES:
patent: 3885157 (1975-05-01), Heinemann
patent: 4382182 (1983-05-01), Matsuzaka et al.
patent: 4712057 (1987-12-01), Pau
patent: 4864131 (1989-09-01), Rich et al.
patent: 5004918 (1991-04-01), Tsuno et al.
patent: 5153434 (1992-10-01), Yajima et al.
patent: 5436449 (1995-07-01), Takahashi et al.
patent: 5552602 (1996-09-01), Kakibayashi et al.

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