Automatically adjustable electron microscope

Details Automatically adjustable electron microscope Automatically adjustable electron microscope

1985-09-09

1986-10-21

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250310, 250307, 250396R, 250397, G01N 2304, G01N 23225

Patent

active

046187669

ABSTRACT:
In order to find criteria for the adjustment of an optimum focus, lens correction, specimen shift and the like, measurements are performed by means of a beam wobbler and the corresponding generation of a variable F(s)=.THETA..vertline.(Xi-Yi+s).vertline.* in order to determine that s-value for which F(s) is a minimum. Using this image shift value is then used to make a correction preferably automatically.

REFERENCES:
patent: 4097740 (1978-06-01), Muller et al.
patent: 4379230 (1983-04-01), Bouwhuis et al.
patent: 4379231 (1983-04-01), Shii et al.

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