Charged particle beam apparatus and specimen holder

Details Charged particle beam apparatus and specimen holder Charged particle beam apparatus and specimen holder

2008-04-30

2010-10-12

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S440110, C250S442110

Reexamination Certificate

active

07812310

ABSTRACT:
Information of a specimen holder or information of a specimen mounted on the specimen holder is stored in a memory inside the specimen holder mounted to an electron microscope. The memory is accessed to transmit the information of the specimen holder to the electron microscope, thereby ensuring that the user can use the specimen holder without mistaking characteristics of the specimen holder and danger of erroneous recording of the specimen information can be reduced.

REFERENCES:
patent: 5481111 (1996-01-01), Rosar et al.
patent: 5753924 (1998-05-01), Swann
patent: 5783830 (1998-07-01), Hirose et al.
patent: 6649919 (2003-11-01), Chao et al.
patent: 7095024 (2006-08-01), Adachi et al.
patent: 7381968 (2008-06-01), Tanaka et al.
patent: 7582885 (2009-09-01), Katagiri et al.
patent: 2002/0066863 (2002-06-01), Chao et al.
patent: 2004/0227082 (2004-11-01), Adachi et al.
patent: 2005/0230636 (2005-10-01), Tanaka et al.
patent: 11-258130 (1999-09-01), None
patent: 2001-076661 (2001-03-01), None
patent: 2001-291483 (2001-10-01), None
Japanese Notice of Rejection Reason, w/ partial English translation thereof, issued in Japanese Patent Application No. JP 2005-117674 dated May 25, 2010.

Affiliated with

Also associated with

Rating

Charged particle beam apparatus and specimen holder does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle beam apparatus and specimen holder, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam apparatus and specimen holder will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4172478