Automatic structure analyzing/processing apparatus

Details Automatic structure analyzing/processing apparatus Automatic structure analyzing/processing apparatus

1989-07-06

1991-08-06

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250310, 359372, 359391, 359368, G01N 2304

Patent

active

050380354

ABSTRACT:
An automatic structure analyzing/processing apparatus for surface structure of material includes a structure observing device for observing structure of a surface of material to produce an electrical image signal thereof, a sample stage disposed opposite to the observing means an image processing device for converting the image signal from the structure observing device to digital signal and expanding or contracting a desired image reproduced from a memory means or combining a plurality of images reproduced from the memory means to produce an image signal, the memory device storing the digital signal processed by the image processing device, and a display device for displaying the image signal produced from the image processing device as an image, whereby the structure of the surface of material is stored in the memory as the image and examination of the structure can be made readily in a short time.

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