Automated feature analysis with off-axis tilting

Details Automated feature analysis with off-axis tilting Automated feature analysis with off-axis tilting

2006-02-22

2008-09-09

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S306000, C250S307000, C250S309000, C250S310000, C250S442110, C250S492100, C250S492300, C250S559200, C250S559240, C356S625000, C356S634000, C356S635000, C356S636000, C356S640000

Reexamination Certificate

active

07423269

ABSTRACT:
One embodiment relates to a method of automated microalignment using off-axis beam tilting. Image data is collected from a region of interest on a substrate at multiple beam tilts. Potential edges of a feature to be identified in the region are determined, and computational analysis of edge-related data is performed to positively identify the feature(s). Another embodiment relates to a method of automated detection of undercut on a feature using off-axis beam tilting. For each beam tilt, a determination is made of difference data between the edge measurement of one side and the edge measurement of the other side. An undercut on the feature is detected from the difference data. Other embodiments are also disclosed.

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