Charged particle beam apparatus and dimension measuring method

Details Charged particle beam apparatus and dimension measuring method Charged particle beam apparatus and dimension measuring method

2011-07-05

2011-07-05

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S310000, C250S306000, C250S307000, C356S237500, C324S754120

Reexamination Certificate

active

07973282

ABSTRACT:
There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.

REFERENCES:
patent: RE27005 (1970-12-01), Wingfield et al.
patent: 4514634 (1985-04-01), Lawson
patent: 5798525 (1998-08-01), Benizri-Carl et al.
patent: 6140644 (2000-10-01), Kawanami et al.
patent: 6278114 (2001-08-01), Mitsui
patent: 6310341 (2001-10-01), Todokoro et al.
patent: 6538249 (2003-03-01), Tanaka al.
patent: 6825480 (2004-11-01), Watanabe et al.
patent: 6868175 (2005-03-01), Yamamoto et al.
patent: 7030394 (2006-04-01), Watanabe et al.
patent: 7164127 (2007-01-01), Nakagaki et al.
patent: 7214936 (2007-05-01), Sato et al.
patent: 7269287 (2007-09-01), Shishido et al.
patent: 7335880 (2008-02-01), Langer et al.
patent: 7460714 (2008-12-01), Shishido et al.
patent: 7608612 (2009-10-01), Matthews et al.
patent: 2004/0188611 (2004-09-01), Takeuchi et al.
patent: 2005/0205780 (2005-09-01), Nakagaki et al.
patent: 2006/0060781 (2006-03-01), Watanabe et al.
patent: 2006/0245636 (2006-11-01), Kitamura et al.
patent: 2007/0187595 (2007-08-01), Tanaka et al.
patent: 2008/0069452 (2008-03-01), Matsumoto
patent: 2008/0100832 (2008-05-01), Sato et al.
patent: 2008/0210867 (2008-09-01), Hitomi et al.
patent: 2008/0245965 (2008-10-01), Sugiyama et al.
patent: 2009/0314938 (2009-12-01), Sato et al.
patent: 10-170817 (1998-06-01), None
patent: 11-264726 (1999-09-01), None
patent: 11-264726 (1999-09-01), None
patent: 11-287618 (1999-10-01), None
patent: 2000-195457 (2000-07-01), None
patent: 2001-068048 (2001-03-01), None
patent: 2002-75263 (2002-03-01), None
Japanese Office Action issued in Japanese Patent Application No. JP 2004-292772 dated Oct. 20, 2009.
European Search Report issued in European Patent Application No. EP 05021657.1 dated May 6, 2010.
Japanese Office Action issued in Japanese Patent Application No. 2004-292772, dated Jul. 17, 2009.

Affiliated with

Also associated with

Rating

Charged particle beam apparatus and dimension measuring method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle beam apparatus and dimension measuring method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam apparatus and dimension measuring method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2714334