4. Radiant energy
  5. Inspection of solids or liquids by charged particles
  6. Electron microscope type
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Lattice strain measuring system and method

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate

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Layered electron beam column and method of use thereof

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate

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Lens system for phase plate for transmission electron...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate

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Low-energy scanning transmission electron microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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