Charged particle beam device with DF-STEM image valuation...

Details Charged particle beam device with DF-STEM image valuation... Charged particle beam device with DF-STEM image valuation...

2006-10-19

2008-12-02

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S310000, C250S306000, C250S307000, C250S492200, C250S492300

Reexamination Certificate

active

07459683

ABSTRACT:
There is disclosed a charged particle beam device which judges whether or not an image based on a dark-field signal has an appropriate atomic number contrast. Input reference information, a bright-field image or a back-scattered electron image is compared with a dark-field image, and it is judged whether or not a correlation value between them or the dark-field image has a predetermined contrast. According to such a constitution, it is possible to obtain information by which it is judged whether or not the dark-field image has an appropriate atomic number contrast.

REFERENCES:
patent: 6552340 (2003-04-01), Krivanek et al.
patent: 7105816 (2006-09-01), Kamiya et al.
patent: 2004/0183017 (2004-09-01), Kamiya et al.
patent: 6-139988 (1994-05-01), None
patent: 7-169429 (1995-07-01), None
patent: 2004-214065 (2004-07-01), None
patent: 2004-253369 (2004-09-01), None

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