Characterizing resist line shrinkage due to CD-SEM inspection
Charged particle beam apparatus and dimension measuring method
Charged particle beam apparatus and dimension measuring method
Charged particle beam apparatus and specimen holder
Charged particle beam device
Charged particle beam device
Charged particle beam device
Charged particle beam device
Charged particle beam device with DF-STEM image valuation...
Charged particle guide apparatus and image viewing apparatus for
Cold trap for electron microscope
Combined electron microscope
Computer control of the electron microscope sample stage
Control system using external computer for electron microscope
Corpuscular beam microscope for ring segment focusing
Corpuscular beam microscope, particularly electron microscope, w
Corpuscular-beam transmission-type microscope including an impro
Corrector for axial and off-axial beam paths
Cryo-charging specimen holder for electron microscope