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Apparatus and method for enabling high resolution film...

Optics: measuring and testing – By light interference – For dimensional measurement
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Apparatus and method for in situ and ex situ measurements of...

Optics: measuring and testing – By light interference – For dimensional measurement
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Apparatus and method for in-situ endpoint detection for...

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Apparatus and method for interferometric measurement of a...

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Apparatus and method for interferometric measurements of...

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Apparatus and method for joint and time delayed measurements...

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Apparatus and method for measurement of critical dimensions...

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Apparatus and method for measurement of critical dimensions...

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Apparatus and method for measurement of film thickness using...

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Apparatus and method for measuring an optical imaging...

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Apparatus and method for measuring aspherical optical...

Optics: measuring and testing – By light interference – For dimensional measurement
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Apparatus and method for measuring characteristics of...

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Apparatus and method for measuring digital imager, package...

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Apparatus and method for measuring flying height and a real...

Optics: measuring and testing – By light interference – For dimensional measurement
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Apparatus and method for measuring mirrors in situ

Optics: measuring and testing – By light interference – For dimensional measurement
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Apparatus and method for measuring surface topography of an...

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Apparatus and method for measuring the optical performance...

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Apparatus and method for measuring two opposite surfaces of...

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