Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2008-02-21
2010-10-26
Connolly, Patrick J (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07821647
ABSTRACT:
An apparatus for measuring surface topography of an object includes an optical arrangement capable of directing a first light beam at a surface of the object, providing a second light beam coherent with and spatially phase-shifted relative to the first light beam, and generating an interference beam from the second light beam and a reflection of the first light beam from the surface of the object. The apparatus further includes at least one line scan sensor for detecting and measuring the interference beam.
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LeBlanc Philip Robert
Schneider Vitor Marino
Trice James Patrick
Connolly Patrick J
Corning Incorporated
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