4. Optics: measuring and testing
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Wafer measurement system and apparatus

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Wavefront and intensity analyzer for collimated beams

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Wavefront measuring apparatus and wavefront measuring method

Optics: measuring and testing – By light interference – For dimensional measurement
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Wavefront measuring apparatus and wavefront measuring method

Optics: measuring and testing – By light interference – For dimensional measurement
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Wavefront sensor with optical path difference compensation

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Wavefront-aberration measuring device and exposure apparatus...

Optics: measuring and testing – By light interference – For dimensional measurement
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Wavefront-aberration measuring device and exposure apparatus...

Optics: measuring and testing – By light interference – For dimensional measurement
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Weighted least-square interferometric measurement of...

Optics: measuring and testing – By light interference – For dimensional measurement
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