Apparatus and method for measuring two opposite surfaces of...

Details Apparatus and method for measuring two opposite surfaces of... Apparatus and method for measuring two opposite surfaces of...

2005-04-26

2005-04-26

Lee, Andrew H. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S512000

Reexamination Certificate

active

06885459

ABSTRACT:
An apparatus and a method are provided which allow two opposite plane surfaces of a body to be interferometrically measured simultaneously using light from a single light source. From a parallel light beam (P) produced by a light source (1) partial light beams (A, B) having positive and negative diffraction angles are produced using a beam splitter (8) in the form of a diffraction grating. The partial light beams strike the respective surfaces (90, 91) of the body (9) to be measured and are reflected thereat. The reflected partial light beams (A, B) are interfered with the throughgoing partial light beam (P) having an order of diffraction of zero and the thus produced interference patterns are digitized and subtracted from each other, whereby the parallelism of both surfaces (90, 91) of the body can be determined.

REFERENCES:
patent: 5355221 (1994-10-01), Cohen et al.
patent: 5684594 (1997-11-01), Platten et al.
patent: 5889591 (1999-03-01), Bruning
patent: 5995226 (1999-11-01), Abe et al.
patent: 6504615 (2003-01-01), Abe et al.
patent: 0 874 215 (1998-10-01), None
patent: 57-182604 (1982-11-01), None
patent: 361023902 (1986-02-01), None
patent: 62-106310 (1987-05-01), None
patent: 404221704 (1992-08-01), None
patent: 408313206 (1996-11-01), None
patent: 11-2512 (1999-01-01), None
patent: 2963890 (1999-08-01), None
patent: 2000-105101 (2000-04-01), None
patent: 02000105114 (2000-04-01), None
patent: 09-154023 (2002-08-01), None

Affiliated with

Also associated with

Rating

Apparatus and method for measuring two opposite surfaces of... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for measuring two opposite surfaces of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for measuring two opposite surfaces of... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3419439