Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-01-09
2007-01-09
Lee, Hwa (Andrew) (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
11204758
ABSTRACT:
A method of interferometrically obtaining measurements for properties associated with a spot on or in an object, the method involving: receiving a sequence of M optical pulses separated in time; from each pulse in the sequence of M optical pulses, generating an n-tuplet of measurement pulses, and an n-tuplet of reference pulses, wherein each measurement pulse has a corresponding reference pulse aligned with it in time; from each pulse of each n-tuplet of reference pulses for the sequence of M optical pulses, generating a reference beam; from each pulse of each n-tuplet of measurement pulses for the sequence of M optical pulses, (a) generating a measurement beam; (b) directing the measurement beam onto the spot to thereby produce a return measurement beam from the spot; and (c) combining the return measurement beam with the corresponding reference beam that was derived from the reference pulse corresponding to that measurement pulse to generate an interference beam, wherein the sequence of M n-tuplets of measurement pulses forms n interleaved sequences of M measurement pulses, and wherein the method further involves, for each of the n interleaved sequences of M measurement pulses, introducing a combination of phase shifts between the measurement beams and corresponding reference beams.
REFERENCES:
patent: 3628027 (1971-12-01), Brauss
patent: 3748015 (1973-07-01), Offner
patent: 4011011 (1977-03-01), Hemstreet et al.
patent: 4226501 (1980-10-01), Shafer
patent: 4272684 (1981-06-01), Seachman
patent: 4408884 (1983-10-01), Kleinknecht et al.
patent: 4672196 (1987-06-01), Canino
patent: 4685803 (1987-08-01), Sommargren
patent: 4733967 (1988-03-01), Sommargren
patent: 5220403 (1993-06-01), Batchelder et al.
patent: 5241423 (1993-08-01), Chiu et al.
patent: 5327223 (1994-07-01), Korth
patent: 5384639 (1995-01-01), Wickramasinghe
patent: 5392118 (1995-02-01), Wickramasinghe
patent: 5485317 (1996-01-01), Perissinotto
patent: 5602643 (1997-02-01), Barrett
patent: 5614763 (1997-03-01), Womack
patent: 5633972 (1997-05-01), Walt
patent: 5659420 (1997-08-01), Wakai
patent: 5699201 (1997-12-01), Lee
patent: 5757493 (1998-05-01), Vaknerkhove
patent: 5760901 (1998-06-01), Hill
patent: 5828455 (1998-10-01), Smith
patent: 5894195 (1999-04-01), McDermott
patent: 5915048 (1999-06-01), Hill et al.
patent: 5923423 (1999-07-01), Sawatari et al.
patent: 6011654 (2000-01-01), Schweizer et al.
patent: 6018391 (2000-01-01), Yosida
patent: 6052231 (2000-04-01), Rosenbluth
patent: 6091496 (2000-07-01), Hill
patent: 6108087 (2000-08-01), Nikoonahad et al.
patent: 6124931 (2000-09-01), Hill
patent: 6252222 (2001-06-01), Kasapi et al.
patent: 6271923 (2001-08-01), Hill
patent: 6330065 (2001-12-01), Hill
patent: 6445453 (2002-09-01), Hill
patent: 6447122 (2002-09-01), Kobayashi et al.
patent: 6469788 (2002-10-01), Boyd et al.
patent: 6480285 (2002-11-01), Hill
patent: 6552805 (2003-04-01), Hill
patent: 6552852 (2003-04-01), Hill
patent: 6597721 (2003-07-01), Hutchinson et al.
patent: 6606159 (2003-08-01), Hill
patent: 6667809 (2003-12-01), Hill
patent: 6707561 (2004-03-01), Budach et al.
patent: 6714349 (2004-03-01), Nam
patent: 6717736 (2004-04-01), Hill
patent: 6753968 (2004-06-01), Hill
patent: 6771374 (2004-08-01), Rangarajan et al.
patent: 6775009 (2004-08-01), Hill
patent: 6806959 (2004-10-01), Tukker
patent: 6847029 (2005-01-01), Hill
patent: 6847452 (2005-01-01), Hill
patent: 2002/0074493 (2002-06-01), Hill
patent: 2002/0131179 (2002-09-01), Hill
patent: 2003/0174992 (2003-09-01), Levene
patent: 2004/0201852 (2004-10-01), Hill
patent: 2004/0201853 (2004-10-01), Hill
patent: 2004/0201854 (2004-10-01), Hill
patent: 2004/0201855 (2004-10-01), Hill
patent: 2004/0202426 (2004-10-01), Hill
patent: 2004/0227950 (2004-11-01), Hill
patent: 2004/0227951 (2004-11-01), Hill
patent: 2004/0228008 (2004-11-01), Hill
patent: 2004/0246486 (2004-12-01), Hill
patent: 2004/0257577 (2004-12-01), Hill
patent: 2005/0036149 (2005-02-01), Hill
patent: 2005/0111006 (2005-05-01), Hill
patent: 2005/0111007 (2005-05-01), Hill
U.S. Appl. No. 60/442,858, filed Jan. 27, 2003, Hill.
U.S. Appl. No. 60/442,982, filed Jan. 29, 2003, Hill.
U.S. Appl. No. 60/443,980, filed Jan. 31, 2003, Hill.
U.S. Appl. No. 60/444,707, filed Feb. 4, 2003, Hill.
U.S. Appl. No. 60/445,739, filed Feb. 7, 2003, Hill.
U.S. Appl. No. 60/447,254, filed Feb. 13, 2003, Hill.
U.S. Appl. No. 60/448,250, filed Feb. 19, 2003, Hill.
U.S. Appl. No. 60/448,360, filed Feb. 19, 2003, Hill.
U.S. Appl. No. 60/459,425, filed Apr. 11, 2003, Hill.
U.S. Appl. No. 60/459,493, filed Apr. 1, 2003, Hill.
U.S. Appl. No. 60/460,129, filed Apr. 3, 2003, Hill.
U.S. Appl. No. 60/485,255, filed Jul. 7, 2003, Hill.
U.S. Appl. No. 60/485,507, filed Jul. 7, 2003, Hill.
U.S. Appl. No. 60/501,666, filed Sep. 10, 2003, Hill.
U.S. Appl. No. 60/506,715, filed Sep. 26, 2003, Hill.
U.S. Appl. No. 60/507,675, filed Oct. 1, 2003, Hill.
U.S. Appl. No. 60/568,774, filed May 6, 2004, Hill.
U.S. Appl. No. 60/569,807, filed May 11, 2004, Hill.
U.S. Appl. No. 60/571,967, filed May 18, 2004, Hill.
U.S. Appl. No. 60/573,196, filed May 21, 2004, Hill.
Connolly Patrick J.
Lee Hwa (Andrew)
Wilmer Cutler Pickering Hale and Dorr LLP
Zetetic Institute
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