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Optics: measuring and testing – By light interference – For dimensional measurement
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Depth-resolved spectroscopic optical coherence tomography

Optics: measuring and testing – By light interference – For dimensional measurement
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Detection of film thickness through induced acoustic...

Optics: measuring and testing – By light interference – For dimensional measurement
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Determination of lithography misalignment based on curvature...

Optics: measuring and testing – By light interference – For dimensional measurement
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Determination of thin film topography

Optics: measuring and testing – By light interference – For dimensional measurement
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Determining endpoint in a substrate process

Optics: measuring and testing – By light interference – For dimensional measurement
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Determining endpoint in a substrate process

Optics: measuring and testing – By light interference – For dimensional measurement
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Determining thickness of slabs of materials by inventors

Optics: measuring and testing – By light interference – For dimensional measurement
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Device and method for a combined interferometry and...

Optics: measuring and testing – By light interference – For dimensional measurement
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Device and method for the determination of imaging errors...

Optics: measuring and testing – By light interference – For dimensional measurement
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Device and method for the interferometric measurement of...

Optics: measuring and testing – By light interference – For dimensional measurement
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Device and method for the optical measurement of an optical...

Optics: measuring and testing – By light interference – For dimensional measurement
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Device and method for wavefront measurement of an optical...

Optics: measuring and testing – By light interference – For dimensional measurement
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Device and method for wavefront measurement of an optical...

Optics: measuring and testing – By light interference – For dimensional measurement
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Device for determining the position of at least one...

Optics: measuring and testing – By light interference – For dimensional measurement
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Device for determining the position of spaced-apart areas in...

Optics: measuring and testing – By light interference – For dimensional measurement
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Device for high-accuracy measurement of dimensional changes

Optics: measuring and testing – By light interference – For dimensional measurement
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Device for measuring the position of at least one structure...

Optics: measuring and testing – By light interference – For dimensional measurement
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Device for measuring translation, rotation or velocity via...

Optics: measuring and testing – By light interference – For dimensional measurement
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Device for measuring translation, rotation or velocity via...

Optics: measuring and testing – By light interference – For dimensional measurement
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