Apparatus and method for measurement of film thickness using...

Details Apparatus and method for measurement of film thickness using... Apparatus and method for measurement of film thickness using...

2003-06-18

2008-10-28

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S451000

Reexamination Certificate

active

07443512

ABSTRACT:
The present invention relates to an apparatus and method for a measurement of a film thickness using an improved fast Fourier transformation. The apparatus includes a light source, a light receiving unit for converging a light from the light source, a detection unit for splitting a reflection light reflected by the surface of the sample and inputted into the optical fabric through the lens, and outputted to the other side of the optical fabric based on a light intensity of each wavelength and providing a certain amount of wavelength, a conversion unit for converting a wavelength based spectrum data detected by the detection unit into an analog signal and then converting into a digital signal through a converter, a computation unit for computing the number of vibrations based on a high speed Fourier transformation, and an analyzing unit for measuring a film thickness.

REFERENCES:
patent: 5440141 (1995-08-01), Horie
patent: 5866917 (1999-02-01), Suzuki et al.
patent: 6239878 (2001-05-01), Goldberg
patent: 6445457 (2002-09-01), Early
patent: 7145662 (2006-12-01), Jeong et al.
patent: 2004/0246493 (2004-12-01), Kim et al.

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