Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2011-04-12
2011-04-12
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07924435
ABSTRACT:
An apparatus is disclosed which includes an interferometry system configured to operate in a first mode to produce a first set of multiple interferometry signals corresponding to different illumination angles of a test object by test light and in a second mode produce a second set of multiple interferometry signals corresponding to different surface locations of a test object. An electronic processor coupled to the interferometry system is configured to receive the first set of interferometry signals and programmed to compare information derivable from the first set of multiple interferometry signals to information corresponding to multiple models of the test object to determine information related to one or features of the test object, and output the information. In some embodiments, the features include an under-resolved feature.
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Colonna De Lega Xavier
de Groot Peter
Chowdhury Tarifur
Fish & Richardson P.C.
Hansen Jonathan M
Zygo Corporation
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