Particle detection on a patterned or bare wafer surface

Performing selected optical measurements with optical...

Phase diversity method and apparatus using fourier transform...

Phase gap analysis for scanning interferometry

Phase shift fringe analysis method and apparatus using the same

Phase shifting interferometric method, interferometer...

Phase shifting wavefront interference method

Phase-diversity wavefront sensor

Phase-measuring microlens microscopy

Phase-resolved functional optical coherence tomography:...

Phase-resolved measurement for frequency-shifting...

Phase-shifting interferometry method and system

Phase-shifting point diffraction interferometer grating designs

Phase-shifting point diffraction interferometer phase...

Photoacoustic detector

Photoelectric position measuring device

Point source module and methods of aligning and using the same

Polarization-sensitive common path optical coherence...

Position detecting system and exposure apparatus using the same

Position detecting system and exposure apparatus using the same