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Particle detection on patterned wafers and the like

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
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Parts recognizing device for mounting machine

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
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Pattern detection system

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
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Pattern evaluation apparatus and a method of pattern evaluation

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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Pattern inspection system

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
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Pattern test device

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Reexamination Certificate

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Photoelectric smoke detector and disaster monitoring system usin

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
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Photomask inspection apparatus and method with improved defect d

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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Print quality control device for perfecting press

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
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Print scanner

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
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Process and apparatus for in-situ qualification of master patter

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
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Process and device for checking the conformity of hybridization

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
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Process for determining and monitoring the shape of the edges of

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
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Profile imaging techniques

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
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